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Thin Film Deposition Controllers

Inficon/Sigma SQC-310 thin film deposition controller.
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Product Code: Inficon/Sigma SQC-310

1 in stock

$0.00


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Description

The SQC-310 series thin film deposition controller ccontrols deposition rate and thickness  in multi-layer thin film processes. It is a low-cost solution for more reliable and accurate deposition than is possible with manual control.

Features
  • Bright 1/4 VGA active matrix color LCD display
  • Standard RS-232 and USB (with Ethernet option)
  • Easy setup and operation with a "Quick Setup" Menu, 6 context-sensitive push buttons, and convenient parameter setting knob
  • Windowns program for developing, testing and downloading processes, and for logging instrument data to your PC for process analysis and quality control
  • Accurate process control, especially for low deposition rates, with +/- 0.03 Hz resolution at 10 readings/second, and with +/- 2 ppm frequency stability over 0 to 50 C
  • Storage capacity for up to 100 processes, 1,000 layers, 50 films
  • Monitoring of source material with a single sensor or with multiple sensors to provide accurate source distribution monitoring
Applications
Sequential thin film deposition control
Technical Specification

Measurement
QCM Inputs 2 (4 optional)
Frequency Range 4 to 6 MHz
Frequency Resolution +/- 0.03 Hz @ 0.10 sec measurement period
Frequency Stability +/- 2 ppm total, 0 to 50 C
Measurement Rate 1 to 10 Hz
Rate Display 0.01 A/sec
Control
Storage 100 processes, 1000 layers, 50 films
Control Outputs 2 (4 optional)
Output Signal +/- 0 to 10 VDC, 15 bits
Digital Inputs/Relays 8 (16 optional)
Digital Inputs 5 VDC non-isolated
Relays SPST Form 1A, 30V, 2A max
Interface(s) RS-232 and USB (Ethernet optional)
Remote Power Control Optional
Display
Type 1/4 VGA 320 X 240 active matrix color LCD
Graphs Rate, deviation, power or full screen numeric
General
Power 100-240 VAC, 50/60 Hz, 25 W
Compliance CE
Windows Software Included
Housing/Mounting 5 1/4" half-rack

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