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Circuit Scan 1000: Scanning Magnetic Microscope

Circuit Scan 1000: Non-destructive magnetic current imaging system. Please contact us for pricing.

Product Code: Circuit Scan 1000

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Operating circuits within a semiconductor generate external magnetic fields near the surface of the device. These magnetic fields, while weak in strength, contain information about the spatial variation of current density flowing within the circuit. Micro Magnetics has developed the CS1000 to make practical use of this information and provide engineers with valuable information about what is going on inside circuitry non-destructively.

The Circuit Scan 1000 is a scanning magnetic microscope capable of capturing external magnetic fields generated by an operating circuit, and then analyzing these fields to provide a map of the current density distribution, with a spatial resolution on the order of tens of nanometers. The system uses a proprietary, ultra-sensitive magnetic sensor technology with deep sub-micron spatial resolution, the technology for which was initially developed in the Nanoscale Physics and Devices group at Brown University.

The CS1000 maps currents at extremely small scales through any dielectric or nonferrous overlayers, and has superior linear response over the full signal range seen in integrated circuits. Our proprietary magnetic sensors have a wide frequency response (0-5 GHz), and are thermally stable, requiring no special environmental controls. Additionally, they have outstanding spatial resolution, resolving features to date as small as 60 nanometers, a feature size well below the current state-of-the-art in the semiconductor industry.

The system is designed to be straight-forward and easy to use. Some of the features which come standard on the CS1000 are full optical and/or NIR navigation and ROI selection, automatic field and current density map overlay, sample surface detection and mapping, automatic sample tilt and contour correction, five distinct contact and non-contact scanning modes, a small-footprint vertical sensing probe, intuitive image stitching, a “Repeat Scan” function to automatically vary parameters, and a full set of calibration functions.

The system also includes our powerful VIsta stand-alone analysis package, which features flexible data display and interpretation, a quantitative analysis package for extraction of all relevant current parameters (including current amplitude and conductor width and depth), two powerful current density conversion algorithms, compact data file formats, exporting of data and images to common file formats, an image comparison and subtraction suite, and automatic overlay of magnetic and current density maps.
  • Sample level sensor: Automatically detects the presence of the sample surface with submicron precision to allow imaging in a non-invasive fashion.
  • Automatic tilt compensation; The system can automatically measure the tilt of the sample, if any, and compensate to ensure high-resolution, non-contact imaging.
  • Multiple scan methodologies: Imaging can be conducted in light contact, non-contact, or constant height modes to ensure optimal results.
  • Image stitching function: Allows creation of blended optical images with fields of view up to 20 times larger than a standard single optical image, for navigation and image registration.
  • Flexible data display: Display results in a number of different color schemes, using 2D or 3D projections, and with variable color scales.
  • Image comparison and subtraction: A simple GUI interface facilitates comparison of multiple magnetic field or current density images.
  • Standalone analysis package: Can be installed on any standard PC for the analysis and viewing of data files.
  • Export images: Automatically save any image into .TIF or .BMP graphics files or print a hard copy of results on any standard printer.
  • Export data: Automatically export numerical results into ASCII, Excel, and other common data formats.
  • Digital zoom: Allows additional image magnification of up to 10X with respect to optical zoom image.
  • Data annotation: Automatic annotation of data and associated images is accomplished simply and intuitively.
  • Calibration suite: Easy-to-use calibration wizards can be used to automatically verify key system parameters and benchmarks.
  • Metallization short circuits
  • Physical defects in metallization layers
  • Conductive leaks and pinholes in oxide layers
  • Burn-in and reliability testing
  • Design debug
Technical Specification

Sensor Patented magnetic tunnel junction (MTJ) or giant magnetoresistive (GMR)
Peak spatial resolution 60 nm
Field noise equivalent 5 nT/rtHz (50uG/rtHz)
Equivalent current noise 125 nA/rtHz
Range of travel 100 mm standard
300 mm optional
Positioning resolution 10 nm (XY) 500 nm (Z)
Sample level sensing resolution < 500 nm
Navigation options High-resolution optical 
Stitched optical/NIR
Near infrared (optional)
CAD layout (optional)
Optical magnification range 90X - 900X
Optical pixel size 0.31 um min.
Optical field of view 320 x 240 um min.
Stitched field of view 25.9 x 19.4 mm max.
Frequency bandwidth 0 - 100 kHz
0 - 3 MHz optional
Integration time 3 ms typical
Typical scan time 3 -5 min.
(1 x 1 mm; 5 um step)
Footprint 1.8 (I) x 1.0 (w) x 1.7 (h) m
Weight approx. 350 kg
Power supply 110 VAC, 50/60 Hz
Operating temperature 10 - 37.8 C (50 - 100 F)
Operating humidity 10 - 90%, non-condensing

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