The switchmode conversion modules achieve high efficiency from line to load. The high-frequency method ensures a rapid response to plasma load changes. The design reduces stored energy at the output by several orders of magnitude. The fast response time virtually eliminates line-induced surges and noise spikes.
Arc-out suppression circuitry provides multi-level suppression and quenching of different types of arcs in the magnetron environment. An added advantage is that Arc-Out reduces target burn-in time and material loss. This feature also prevents dumping of energy into hot spots by sensing a change in current and immediately shutting the power off. Start up is controlled so that hot spots cool before power is turned back on, preventing renewed arcing.
The MDX 500W can be used as a power, current, or voltage source, depending on the method of output regulation selected. The setpoint level is set with a locking potentiometer to ensure repeatability from run to run. The MDX 500W can be controlled either from the front panel or from the optional analog/digital User port.
By configuring three ramp switches on the rear panel, you can select fast ramp or some combination of 0.1, 1, or 10 seconds (the ramp times are additive).
The contactor hold function causes the contactor to remain closed after the first ramp start. Contactor hold shortens the time needed for the output to reach setpoint on subsequent runs. |
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