High Vacuum Magnetron Sputter Source

Brief Description:

The SpinTron is a circular magnetron sputter source with a 1, 2, 3, 4, or 6-inch diameter. It can accommodate a wide range of sputtering targets, metallic or insulating, magnetic or non-magnetic. The internal magnetic configuration utilizing a circular rare-earth NdFeB permanent magnet enables excellent film uniformity and target utilization. SpinTron is easy to install, operate and maintain. The quality construction provides long-term operation. The shock-absorbing packaging design allows secure shipping and storage.

Benefits:

Quality construction: The SpinTron series of high vacuum magnetron sputter source was designed and manufactured with a focus on details. We use high quality materials of stainless steel and ceramics. The design and selection of components and materials are based on the principles of physics and engineering.

Enhancement from magnetic assembly: We have used electromagnetic finite element calculations in the design of the permanent magnetic assembly to achieve high field strength and uniform field profile. We use NdFeB rare-earth permanent magnet in every SpinTron product, and offer a true magnetron sputtering tool. The magnet is coated with multiple layers of protective materials against cooling-water induced corrosion for durability.

Strong coupling with external power: The SpinTron is equipped with a standard electrical RF connector, which matches physically and electronically with a wide range of DC and RF sputtering power supplies. The low impedance sputtering heads interface easily with external power supply.

Easy installation and adjustment: The SpinTron can be installed very easily with a standard fitting without the use of special tools. Its position in the vacuum chamber can be adjusted conveniently.

Easy target change: Change of target is as easy as "123" by firstly placing the target on the top surface of a gun, then putting on the target cover, and finally, adding on the anode shield. There is no need to adjust the sputter source to fit targets with different height.

Versatile sizes: The SpinTron Series consists of 1,2,3,4,6-inch diameter sputtering heads. Other diameters can be custom made with similar performance as the standard offerings.

Easy maintenance: The SpinTron is easy to maintain and designed to have a long life time.

Customer centered services: We warrantee our products against defective parts and poor workmanship. We strive to minimize down-time for the products. We are so confident about the SpinTron that we will provide a loaner for a SpinTron under repair, so that the disruption to your business is minimized.